On February 23, 2023, the Ministry of Industry and Information Technology and other seven departments issued the "Intelligent Testing Equipment Industry Development Action Plan (2023-2025)", which defined intelligent testing equipment as "core equipment of intelligent manufacturing" and rose to the height of "improving the resilience and safety level of the industrial chain and supply chain, supporting the construction of manufacturing power, quality power and digital China". From the overall objective, basic principles, specific implementation areas, support policies and other dimensions were explained, in the top-level design height delineated the development direction of intelligent testing equipment industry and landing measures. It is proposed that by 2025, intelligent inspection technology will basically meet the manufacturing process needs of users in the field, and the supply capacity of core components, special software and complete machine equipment will be significantly improved. The disease of sound and the urgency of the plan all show that the testing industry is about to come at the moment, and is at the key node of reshaping the pattern and intensive force.

Clearly put forward the core components/components: high-performance X-ray detector, high-power micro-focal spot X-ray tube. This fully reflects the country's emphasis on mastering key core technologies and improving the level of domestic substitution, which is conducive to promoting the development of domestic intelligent testing equipment and breakthroughs in independent core components.

The two core components of X-ray intelligent inspection equipment are X-ray source and X-ray detector. X-ray tubes are the most technically difficult core parts of X-ray sources, which can also be called "the core of the core".

Microfocal spot X-ray tube is the focus size of the micron level of X-ray tube, its technical difficulty is the highest level of research and development in the entire field of X-ray tube, at present, Germany Yxlon, Finetech, X-WorX, the United States ThermoFisher, Japan Hamamatsu Mitsuko both master the technology, but also control the global market supply.

Limited by the lack of domestic technology and manufacturing level, China's industrial image detection of micro focus X-ray sources almost all rely on imports, and the largest use of closed micro focus X-ray source products and core technology are mainly in the hands of Japan's Hamamatsu Photonics and the United States Thermo Fisher two companies. With the continuous improvement of the demand for precision testing equipment in China, the problem of insufficient supply of key core components has become increasingly prominent, especially with the development of downstream integrated circuits and new energy battery industries, the downstream faces the dilemma of "one source is difficult to find", which has seriously affected the product quality detection level of downstream related industries.

The United States government implemented the new EAR bill on October 7, 2022, and on January 30, 2023, the United States lobbied Japanese and Dutch officials to reach an agreement in Washington, agreeing to expand chip export control measures to China. Although the United States and Japan do not currently impose restrictions on the export of micro-focus X-ray sources, overseas suppliers have been unable to deliver in sufficient quantities and on time due to supply constraints. The core component of X-ray intelligent inspection equipment used for semiconductor internal defect detection is the micro-focus X-ray source. If Sino-US friction continues to escalate, the United States and Japan are likely to "restrict" the export of micro-focus X-ray sources, which will affect the security of China's semiconductor industry.

Localization is imminent, which has caused the relevant departments to attach great importance, after the Spring Festival, the Ministry of Industry and Information Technology and other seven departments issued the "Intelligent testing equipment industry Development Action Plan (2023-2025)", the high-performance X-ray detector, high-power micro-focal spot X-ray tube as a key project in the first column.